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Manufacturing processes in microtechnology

Module (6CP) – regular cycle winter semester. Main focus of this event is on the following aspects:

Clean room technology, vacuum technology, thinfilm technology, deposition processes, sputter processes, CVD-processes, wet- and dry etching technologies, galvanic deposition, photolithography, electron beam lithography and X-ray lithography, resist materials, surface – micromachining, bulk – micromachining, design rules and micro-assembly.

The topics will be fully dealt with application and product examples during the lecture. According to the concept of practical deepening, an accompanying exercise will be offered during the lecture.

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