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Welcome to the Chair of Micro and Precision Devices


In the Chair of Micro and Precision Devices, we focus on the development and realization of micro optical, micro mechanical, micro fluidical and micro electrical components and systems. Our research scope comprises the development of products, processes and materials for the micro and nanotechnology.

In teaching, we stand for sound, practice-oriented education of students in the field of micro and nanotechnology.

Introducing: Mechanical engineering specialization in microtechnology

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Auxiliary Functions

Chair of micro and precision devices
Secretariat PTZ 7

Pascalstraße 8-9
10587 Berlin

Phone.: +49 30 314 - 27889
Room: PTZ 103