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RSAlion - Optimization of diamond machined RSA-Al501 surfaces for optical applications by process-integrated ion beam machining

Initial situation

Ultraprecision machining has been an established process for the production of metal optics for several decades and has been continuously optimized. However, even today the achievable roughness and shape deviations are insufficient to provide highly efficient optics for wavelength ranges in the VIS-UV and shorter. Due to the possibility of processing metal optics by ion beam based techniques, a process chain consisting of ultra precision machining followed by ultra precision ion beam processing has been established in recent years, in addition to mechanical polishing, which enables the achievement of these goals. However, the interaction processes of the respective surface formation mechanisms of the manufacturing processes within the process chain are not sufficiently known even today with regard to the resulting surface formation and thus do not allow sufficient prediction of the process results. Especially for the post-processing of microstructured optics, such as hybrid optical elements for miniaturized spectrometric systems, a fundamental understanding of the surface formation within this process chain is becoming increasingly important in order to be able to achieve the set goals with respect to shape and fineness as well as the preservation of the structure.


The overall objective of the project is the production of metal optics for the VIS-UV range by means of a process chain consisting of ultra-precision machining and subsequent ion beam machining. The working hypothesis of the project is the assumption that the changes in the edge zone caused by ultra-precision machining have an influence on the ion beam processes.
Basic knowledge about the material properties of the aluminum alloy RSA-501 after machining with geometrically defined and undefined diamond tools as well as their effects on ion beam based smoothing and removal processes shall be obtained. From this, process strategies and parameters for shape correction and surface smoothing using ion beam machining of RSA-501 will be derived. The generation of the continuous and discontinuous geometries by means of ultra-precision machining currently enables roughness values of the blaze flanks in the range Rq > 2nm. Through the knowledge gained in the project, it is expected that, especially through the investigations of the interaction of ion beam with the surface, roughness values below Rq < 0.5 nm with shape deviations < 2 nm can be realized.

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Daniel Rolón, M.Sc.
+49 30 314-23553
Room 102