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Measurement technology

Multisensor coordinate measurement technology

Multisensor coordinate measurement machine "Werth VideoCheck 400 HA""Werth VideoCheck 400 HA"
Verfahrwege
XY: 400 mm | Z: 200 mm
Multi-sensors



Zoom objektive: 1x - 10x
Fixed objektive: 10x, 20x, 50x
Fiber probe: R > 12.5 µm | Probing force: > 1 µN
Messtaster: R > 0.15 mm | Probing force: > 30 mN
Additional properties
Air bearings
Length measurement error < 0.5 µm

Surface measurement technology

Atomic force microscope "Nanosurf NaniteAFM""NanoSurf Nanite"
Maximum scan range (XY)
110 µm
Maximum Z-range
22 µm
XY-linearity mean error
< 0.6 %
Z-measurement noise level (RMS, static mode)
typ. 350pm (max. 500 pm)
Z-measurement noise level (RMS, dynamic mode)
typ. 90 pm (max. 150 pm)
Specials





Scan stage (XY 100 mm)
Removable scan head with 3-point quick-lock mounting plate, mountable to Nanosurf or custom stages
Automatic self-alignemt for cantilevers with alignment grooves
4.5 mm automatic approach range
Sample observation
White LED sample illumination

Zusatzinformationen / Extras

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